METHOD FOR MEASURING SURFACTANT AMOUNT, METHOD FOR MEASURING ALKALI COMPONENT AMOUNT, AND DEVELOPING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a surfactant amount for quantitatively measuring the amount of only an active surfactant excluding a surfactant adsorbed to a resist, and to provide a method for measuring an alkali component amount and to provide a developing device. SOLUTION: A developer containing a surfactant or a developer containing an inorganic or organic alkali component is filtered through an ultrafiltration filter 21, and the obtained filtrate is used for quantitative measurement of the surfactant amount or the alkali component amount. The developing device has a means of controlling the surfactant amount or inorganic or organic alkali component amount in the developer to a desired concentration after measuring the surfactant amount or inorganic or organic alkali component amount by the above measurement method. COPYRIGHT: (C)2007,JPO&INPIT