发明名称 METHOD AND DEVICE FOR MANUFACTURING ORGANIC EL DISPLAY
摘要 PROBLEM TO BE SOLVED: To provide a high-reliability organic EL display that is high in manufacturing yield while maximally reducing moisture in an overcoat layer and preventing dispersion of a residual gas and the moisture, is stably operated even with long-term driving, and has no display failure. SOLUTION: An organic EL display manufacturing method is composed so as to successively arrange color-conversion filter layers (11, 12), the overcoat layer (14), an inorganic passivation layer (16), and organic EL laminated bodies (17, 18, and 19) on a transparent support substrate (13). The method is also composed so that a heating step for removing the moisture under vacuum at 150-200°C is provided after forming the overcoat layer, and the heating step and an inorganic passivation layer forming step are executed under vacuum or under an inactive atmosphere without being exposed in the atmosphere. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007234310(A) 申请公布日期 2007.09.13
申请号 JP20060052433 申请日期 2006.02.28
申请人 FUJI ELECTRIC HOLDINGS CO LTD 发明人 MATSUKAZE NORIYUKI
分类号 H05B33/10;H01L51/50;H05B33/12;H05B33/22 主分类号 H05B33/10
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