| 摘要 |
PROBLEM TO BE SOLVED: To provide a compressed gas supply facility and a method wherein deterioration or damage of a seal member of a gas supply valve can be surely captured, gas components generated from the seal member is prevented from being leaked to the outside or from intruding into compressed gas so as to pollute the compressed gas, and improvement of safety, prevention of product pollution, and optimizing of seal member replacement timing can be achieved. SOLUTION: A branch passage 19 equipped with an analyzer 18 is provided in a passage on a secondary side of the gas supply valve 14 for controlling gas supply from a compressed gas supply source 11 to a small gas vessel 12, and gas supply from the compressed gas supply source 11 is stopped when the gas components generated from the seal member of the gas supply valve 14 is detected by the analyzer 18. COPYRIGHT: (C)2007,JPO&INPIT
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