| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for separating a stamper from a substrate without damaging the substrate or an imprinted profile domain. SOLUTION: The method for separating the stamper from a pattern formed substrate includes; a step to prepare a substrate having a top surface and a bottom surface with opening, a step to prepare a supporting mechanism made to hold the substrate, a step to prepare a stamper which is pattern formed and made to contact with the substrate; and is characterized in that a chamber is formed on the opening of the substrate when the stamper contacts with the substrate. The method further includes; a step to prepare a passage for sending pressurized air into the chamber, and a step to start separation of the stamper from the substrate by sending the pressurized air into the chamber through the passage. COPYRIGHT: (C)2007,JPO&INPIT
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