SEMICONDUCTOR DEVICE WITH CHARGE STORAGE PATTERN AND METHOD FOR FABRICATING THE SAME

摘要

A semiconductor device (e.g., a non-volatile memory device) with improved data retention characteristics includes active regions that protrude above a top surface of a device isolation region. A tunneling insulating layer is formed on the active regions. Charge storage patterns (e.g., charge trap patterns) are formed so as to be spaced apart from each other. A blocking insulating layer and a gate are formed on the charge storage patterns.