| 摘要 |
PROBLEM TO BE SOLVED: To evaluate efficiently characteristics of a thermopile sensor. SOLUTION: A fixing stand 11 fixes a wafer 2 with which a sensor element of the thermopile sensor is formed. The fixing stand 11 and a laser oscillator 12 are arranged separately that the heat of the laser oscillator 12 is not transferred into the wafer 2 in the fixing stand 11. In an optical system 15, an output of a laser beam of the laser oscillator is led to the sensor element formed on the wafer 2, and the laser beam is irradiated on the sensor element to be evaluated. The sensor element detects this laser beam and outputs a voltage signal. A computer 18 evaluates the property of the sensor element, at the state which the sensor element is formed on the wafer 2, based on the output value of the sensor element which is amplified by a preamplifier 16, a lock-in amplifier 17. COPYRIGHT: (C)2007,JPO&INPIT
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