摘要 |
PROBLEM TO BE SOLVED: To provide a valve mechanism for controlling suitably a fluid stream and a pressurized fluid device operation maintaining mechanism equipped with the valve mechanism, which maintains suitably an operation of a pressurized fluid device at a given case and further to provide a bellows valve as a pressurized fluid device equipped with the operation maintaining mechanism. SOLUTION: The valve mechanisms 80, 90 are equipped with: valve main bodies 81, 91; valve bodies 82, 92; compression springs 83, 93; piston rods 84, 94; and pistons 85, 95, respectively. First ports 816, 916 are coupled to a pressurized fluid supply means, second ports 817, 917 are coupled to a first cylinder chamber and a second cylinder chamber, respectively, which are inside piston cylinders of the bellows valve, a third port 818 is coupled to a fourth port 919, and a fourth port 819 is coupled to a third port 918. When pressurized air is urgently stopped from being supplied, valve seats 813, 913 are closed in the valve bodies 82, 92, respectively, thus allowing the operation of the bellows valve to be held in a state of its emergency stop. COPYRIGHT: (C)2007,JPO&INPIT
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