发明名称 |
Method of performing multiple stage model calibration for optical imaging simulation models |
摘要 |
A method of calibrating a simulation model of a photolithography process. The method includes the steps of defining a set of input data; defining a simulation model having model parameters which affect the simulation result produced by the simulation model; performing a first stage calibration process in which the model parameters and alignment parameters are adjusted such that the simulation result is within a first predefined error tolerance; and performing a second stage calibration process in which the alignment parameters are fixed and the model parameters are adjusted such that the simulation result is within a second predefined error tolerance.
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申请公布号 |
US2007213967(A1) |
申请公布日期 |
2007.09.13 |
申请号 |
US20070708137 |
申请日期 |
2007.02.20 |
申请人 |
PARK SANGBONG;HSU DUAN-FU S;TEJNIL EDITA |
发明人 |
PARK SANGBONG;HSU DUAN-FU S.;TEJNIL EDITA |
分类号 |
G06G7/48 |
主分类号 |
G06G7/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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