发明名称 LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER
摘要 Each pin fixing portion is fitted in a through-hole formed in a lifter arm, and includes a flange portion, a movable portion, a screw portion, and a pin insertion hole. A pin is fixedly screwed into the pin insertion hole at a lower end. The movable portion is inserted with an allowance in the through-hole, and the flange portion is set in contact with an upper surface of the lifter arm. The screw portion projects downward from the through-hole. A lower support portion is screwed on the screw portion and set in contact with a lower surface of the lifter arm.
申请公布号 US2007212200(A1) 申请公布日期 2007.09.13
申请号 US20070683015 申请日期 2007.03.07
申请人 TOKYO ELECTRON LIMITED 发明人 UEDA ATSUSHI;YAMASHITA JUN
分类号 H01L21/677 主分类号 H01L21/677
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