METHODS AND ARRANGEMENT FOR IMPLEMENTING HIGHLY EFFICIENT PLASMA TRAPS
摘要
<p>An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.</p>
申请公布号
WO2007102923(A2)
申请公布日期
2007.09.13
申请号
WO2006US62445
申请日期
2006.12.20
申请人
LAM RESEARCH CORPORATION;KAMAREHI, MOHAMMAD;WANG, ING-YANN ALBERT