XY MOVABLE STAGE, DRIVING CONTROL METHOD AND CAMERA SHAKE CORRECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a new and improved XY movable stage which can be controlled only by magnetic force without providing mechanical rotation preventing structure and attracting structure to a fixed part, and a driving control method and a camera shake correcting device. SOLUTION: The XY movable stage is equipped with: an attraction part for attracting a movable part 100 to the fixed part 110 by the magnetic force; a plurality of sensors 140 each detecting the moving amounts of two points in the same direction; and a plurality of electromagnetic actuators each linearly controlling the two points. The movable part is controlled to rotate on an XY plane by using the plurality of electromagnetic actuators based on rotational manipulated variable and rotational amount calculated from the difference of the moving amount detected by the plurality of sensors, and the movable part is linearly controlled in one direction by using at least one of the plurality of electromagnetic actuators based on linear manipulated variable and the moving amount detected by at least one of the plurality of sensors. COPYRIGHT: (C)2007,JPO&INPIT