| 摘要 |
PROBLEM TO BE SOLVED: To inspect dispersion in the height direction of a sample such as a semiconductor device. SOLUTION: This device has a holder 211 for holding the sample 29, a charging control part 23 for charging the sample 29 held by the holder 211, a retarding power source 24 for applying a voltage to the sample 29 held by the holder 211, an electronic optical system 20 for irradiating an electron beam toward the sample 29 to which the voltage is applied by the retarding power source 24 and imaging mirror electrons drawn back near the sample 29 surface, and an image processing part 27 for performing image processing of a mirror image acquired by imaging the mirror electrons. The image processing part 27 outputs information corresponding to the difference between the mirror image acquired by imaging the mirror electrons and a mirror image of a standard article prepared beforehand as the dispersion in the height direction of the sample 29. COPYRIGHT: (C)2007,JPO&INPIT
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