| 发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
| 摘要 |
A semiconductor device includes a cylindrical capacitor. A size of hemispherical silicon grains (HSGs) formed in a straight portion of the cylindrical capacitor is smaller than a size of HSGs formed in a bowing portion of the cylindrical capacitor.
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| 申请公布号 |
US2007210365(A1) |
申请公布日期 |
2007.09.13 |
| 申请号 |
US20070679386 |
申请日期 |
2007.02.27 |
| 申请人 |
ELPIDA MEMORY, INC. |
发明人 |
TOGASHI YUKI;KITAMURA HIROYUKI |
| 分类号 |
H01L29/00 |
主分类号 |
H01L29/00 |
| 代理机构 |
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代理人 |
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