发明名称 FLUID HANDLING DEVICE WITH ISOLATING CHAMBER
摘要 <p>A fluid handling device includes a body portion defining a flow passage and an impulse chamber extending from the flow passage. The impulse chamber is fluidly coupled with the flow passage and has a pair of opposing ends defining a length dimension therebetween. The impulse chamber further presents a diameter dimension transverse to the length dimension, wherein the length dimension is at least 3 times and not greater than 10 times the diameter dimension. The device further includes at least one sensor operably coupled with the body portion. The sensor is disposed proximate the end of the impulse chamber opposite the flow passage and presents a sensing face facing into the impulse chamber.</p>
申请公布号 WO2007103486(A2) 申请公布日期 2007.09.13
申请号 WO2007US05907 申请日期 2007.03.08
申请人 ENTEGRIS, INC.;PETERSON, THOMAS 发明人 PETERSON, THOMAS
分类号 G01F23/26 主分类号 G01F23/26
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