| 发明名称 |
METHOD OF POLISHING A TUNGSTEN CARBIDE SURFACE |
| 摘要 |
<p>The invention is directed to a method for polishing a surface comprising tungsten carbide, comprising contacting a surface comprising tungsten carbide with an oxidizing agent, a polishing component, and a liquid carrier, and abrading at least a portion of the surface to polish the surface. The invention further provides a method for reconditioning a workpiece comprising tungsten carbide. The invention also provides a cutting tool insert having a highly polished surface.</p> |
| 申请公布号 |
WO2007103578(A1) |
申请公布日期 |
2007.09.13 |
| 申请号 |
WO2007US06117 |
申请日期 |
2007.03.09 |
| 申请人 |
CABOT MICROELECTRONICS CORPORATION;SPIRO, CLIFFORD;STEUER, GEORGE;KAUFMAN, FRANK |
发明人 |
SPIRO, CLIFFORD;STEUER, GEORGE;KAUFMAN, FRANK |
| 分类号 |
B24B37/00;C09K13/04;H01L21/30 |
主分类号 |
B24B37/00 |
| 代理机构 |
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