| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece processing device capable of easily elongating an average life of a plurality of plasma generating nozzles mounted on the device. <P>SOLUTION: The workpiece processing device S, so structured to convey a workpiece W as an object for processing and at the same time irradiating plasma on the workpiece W to give it a given processing, is provided with a plasma generating unit PU equipped with a microwave generating device 20 generating microwaves, a waveguide 10 transmitting microwaves, and a plasma generating part 30 made up by mounting on the waveguide 10 a plurality of plasma generating nozzles 31 receiving the microwaves, generating and discharging plasma gas on the basis of energy of the microwaves, a conveying means C conveying the workpiece W so as to pass through the plasma generating part 30, and a total control part 94 selectively changing over the plasma generating nozzles 31 discharging plasma (plume P) in accordance with a shape of the workpiece conveyed by the conveying means C. <P>COPYRIGHT: (C)2007,JPO&INPIT |
