| 摘要 |
PROBLEM TO BE SOLVED: To provide a line sensor inspection device constituted so as not only to achieve space saving but also to enhance the versatility of the inspection of an object. SOLUTION: In the line sensor inspection device equipped with an arranging surface 14 on which the object S can be arranged and the running part 13 which runs on the arranging surface 14, the running part 13 is equipped with an illumination means 18 for irradiating the object S with light, a photographing means 19 for loading the image data of the object S on-line by the light of the illumination means 18 and a mirror part 20 for folding back the photographing light path (b) from the object S to the photographing means 19. COPYRIGHT: (C)2007,JPO&INPIT
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