发明名称 Semiconductor device and method of manufacturing the same
摘要 Provided is a semiconductor device formed to an SOI substrate including a MOS transistor in which a parasitic MOS transistor is suppressed. The semiconductor device formed on the SOI substrate by employing a LOCOS process is structured such that a part of a a polysilicon layer to becomes a gate electrode includes: a first conductivity type polysilicon region corresponding to a region of the silicon active layer which has a constant thickness and is to become a channel; and second conductivity type polysilicon regions corresponding to LOCOS isolation edges in each of which a thickness of the silicon active layer decreases.
申请公布号 US2007210382(A1) 申请公布日期 2007.09.13
申请号 US20070703258 申请日期 2007.02.07
申请人 YOSHINO HIDEO;HASEGAWA HISASHI 发明人 YOSHINO HIDEO;HASEGAWA HISASHI
分类号 H01L27/12 主分类号 H01L27/12
代理机构 代理人
主权项
地址