摘要 |
PROBLEM TO BE SOLVED: To provide an optical element in which refractive index difference can be ensured between a member at the lower portion of a photonic crystal layer and the crystal layer without using a conventional sticking technology, and to provide a fabrication process of the optical element, and a semiconductor laser device employing the optical element. SOLUTION: In the optical element having a first layer 108 and a second layer 106 on a substrate 100, the second layer is constituted to include pores and has such a structure as the refractive index in the in-plane direction differs periodically, the first layer has an oxidation region on the lower portion side of the pore in the second layer, and the refractive index of the oxidation region is lower than that of the second layer. COPYRIGHT: (C)2007,JPO&INPIT
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