| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an antifreezing device for a vacuum line capable of preventing the vacuum line from freezing with a simple configuration. <P>SOLUTION: A pure water supply source 42 is connected to a pure water supply line 41 which is branched from a vacuum line 32, extended and provided. The temperature of the inside of the vacuum line 32 can be maintained to approximately same degree as the pure water by supplying the pure water from the pure water supply source 42 into the vacuum line 32 through the pure water supply line 41, and generation of freezing can be prevented in the vacuum line 32 thereby. <P>COPYRIGHT: (C)2007,JPO&INPIT |
