METHOD FOR MANUFACTURING CELL ELECTROPHYSIOLOGICAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a cell electrophysiological sensor with excellent productivity generating little chipping.

SOLUTION: This method includes a first process for forming a resist mask 11 on one side of a substrate 1, a second process for forming a through hole 4 of a desired shape by introducing first etching gas and second etching gas, a third process for forming a resist mask 12 made thinner in a tapered shape from the end to the center forming a well 2 on the other side of the substrate 1, and a fourth process for forming the well 2 by introducing the first etching gas and the second etching gas. The method also includes a step of cutting out outline by etching simultaneously in any of the first to fourth processes.

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