摘要 |
PROBLEM TO BE SOLVED: To provide a channel electron multiplier having high detection efficiency and a long lifetime. SOLUTION: The channel electron multiplier has a single channel CEM 502 for receiving incident particles. A multi-channel CEM is positioned after the single channel CEM 502 for receiving emissions from the single channel 502. An electron collector 520 is positioned after the multi-channel CEM for generating a pulse current in response to emissions from the multi-channel CEM. COPYRIGHT: (C)2007,JPO&INPIT
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