ROTARY MACHINE FOR PURE WATER USING CERAMIC SLIDE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a rotary machine for pure water using a ceramic slide member capable of being used stably in pure water or ultrapure water over a long period of time. SOLUTION: The rotary machine includes the ceramic slide member equipped with a rotating side member 51 and a fixed side member 52 for sliding against each other and rotatably supporting a shaft. At least one of the rotating side member 51 and the fixed side member 52 is made of SiC containingβ-SiC in at least one portion. COPYRIGHT: (C)2007,JPO&INPIT