| 摘要 |
There is disclosed a method for producing a thin film material, comprising plugging pores in a surface of a porous substrate with a polymer compound, forming a metal oxide thin film or an organic/metal oxide composite thin film on the plugged porous substrate, and removing the polymer compound or both of the polymer compound and an organic compound in the thin film. The metal oxide thin film or the organic/metal oxide composite thin film can be uniformly formed without defects directly on the porous substrate by the method. |
