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发明名称
Ionizer for gas cluster ion beam formation
摘要
申请公布号
EP1255277(B1)
申请公布日期
2007.09.12
申请号
EP20010650051
申请日期
2001.05.01
申请人
TEL EPION INC.
发明人
DYKSTRA, JERALD P.
分类号
H01J27/20;H01J27/02;H01J37/08;H01J49/04
主分类号
H01J27/20
代理机构
代理人
主权项
地址
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