A METHOD OF FABRICATING AN EPITAXIALLY GROWN LAYER

摘要

The fabrication of an epitaxial layer (6) consists of: (a) implanting some atomic species into a support substrate (1) to define a fragile zone delimiting a thin support layer (13) from the rest (11) of the substrate; (b) transferring a thin nucleation layer (23) onto this thin support layer; (c) detaching the rest of the substrate along the fragile zone but keeping the thin support layer in contact with the rest of the substrate; (d) growing by epitaxy the epitaxial layer on the nucleation layer; (e) separating the rest of the substrate from the thin support layer.