APPARATUS ELEVATING FOOTHOLD AUTOMATICALLY FOR SURFACE INSPECTION IN GLASS

摘要

An automatic foothold elevating apparatus for inspecting a surface of a substrate is provided to reduce an inspection time by adjusting automatically height of an inspector at a proper position according to height of stature of a substrate position system. An automatic foothold elevating apparatus for inspecting a surface of a substrate is used for inspecting defects on the surface of the substrate. The automatic foothold elevating apparatus includes an automatic elevating unit. The automatic elevating unit is positioned at a predetermined position apart from a substrate position system(400) in order to inspect a test target substrate(600) at optimum height according to stature of an inspector(500) with the naked eye. The automatic elevating unit includes a foothold(110) having a sensor(111) for measuring the stature of the inspector with a half wave signal of an ultrasonic wave, a plurality of ultrasonic transmitters/receivers(140,141), a micom for comparing and determining received signals of the receivers, and a lift for elevating the foot hold according to a control signal of the micom.