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摘要
申请公布号
JP3975844(B2)
申请公布日期
2007.09.12
申请号
JP20020195640
申请日期
2002.07.04
申请人
发明人
分类号
H01L29/739;H01L29/861;H01L21/336;H01L29/12;H01L29/78
主分类号
H01L29/739
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