发明名称 METHOD FOR FORMING LIGHT ABSORBING LAYER IN CIS-BASED THIN FILM SOLAR BATTERY
摘要 A simple device is used to make the temperature in an apparatus even and improve the state of being in contact with reactant gases, selenium, and sulfur. A fan 3 as a device for atmosphere homogenization is disposed in an apparatus, and the work is disposed in the manner which enables a reactant gas to circulate smoothly. Namely, flat platy works 2 are disposed apart from each other at a certain distance parallel to the direction of the major axis of the apparatus while keeping the plates vertical so that the apparatus has passages within the group of works and has gas passages over and under the works and on both sides thereof. Thus, each work is apt to come into contact with the reactant gases in the apparatus and the temperature in the apparatus is even. The state of being in contact with the reactant gases, selenium, and sulfur is improved.
申请公布号 EP1833097(A1) 申请公布日期 2007.09.12
申请号 EP20050819563 申请日期 2005.12.26
申请人 SHOWA SHELL SEKIYU KABUSHIKI KAISHA 发明人 ONODERA, MASARU;KURIYAGAWA, SATORU;TANAKA, YOSHIAKI
分类号 H01L31/04;H01L21/365;H01L31/18 主分类号 H01L31/04
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