LIFTER FOR PREVENTING BROKEN OF WAFER

摘要

A lifter is provided to prevent damage of a wafer and contamination of the wafer due to particles by suppressing the breakdown of the wafer due to an arm unit. An elevation shaft(10) is installed at an outside of a vacuum chuck in order to perform elevation motion. An arm unit(20) includes an upper loading plate on which a wafer is loaded. A mounting adapter(30) is coupled with the arm unit in order to form one body. One end of the mounting adapter is rotatably connected to the elevation shaft in order to rotate the arm unit at a top part. The elevation shaft is elevated between a position lower than a position of the vacuum chuck and the top part of the predetermined height from the vacuum chuck. The arm unit is formed with a shape of ring having an opening.