THE APPARATUS AND METHOD OF NANO POWDER SYNTHESIS USING COLLISINAL PROCESSES OF PLASMA CHARGED PARTICLES

摘要

A system for preparing nanopowder using plasma charged particle collision is provided to obtain nanopowder of a multinary metal or fine ceramic powder having a desired size and composition with high efficiency, and to allow in-situ fabrication of high-quality electromagnetic devices. A system for preparing nanopowder using plasma charged particle collision comprises: at least one arc source unit(100) for causing arc discharge in an arc target(110) formed of a parent metal or semiconductor material and generating plasma jet of plasma charged particles; a magnetic filter unit(200) attached to the plasma jet outlet of the arc source unit in a bent shape for removing plasma charged particles having a size larger than a predetermined size and neutral plasma particles from the plasma jet discharged from the arc source unit; and a nanopowder preparation chamber(300) in which the filtered plasma charged particles are introduced and converted into nanopowder.