发明名称 |
MEMS DEVICE HAVING A TRILAYERED BEAM AND RELATED METHODS |
摘要 |
<p>MEMS Switch Designs and Related Methods. According to one embodiment, a movable, trilayered microcomponent suspended over a substrate is provided and includes a first electrically conductive layer patterned to define a movable electrode. The first metal layer is separated from the substrate by a gap. The microcomponent further includes a dielectric layer formed on the first metal layer and having an end fixed with respect to the substrate. Furthermore, the microcomponent includes a second electrically conductive layer formed on the dielectric layer and patterned to define an electrode interconnect for electrically communicating with the movable electrode.</p> |
申请公布号 |
EP1454333(B1) |
申请公布日期 |
2007.09.12 |
申请号 |
EP20020797085 |
申请日期 |
2002.11.08 |
申请人 |
WISPRY, INC. |
发明人 |
CUNNINGHAM, SHAWN, J.;DEREUS, DANA, R.;SETT, SUBHAM;TATIC-LUCIC, SVETLANA |
分类号 |
B81B3/00;B81B7/00;H01H1/04;H01H1/50;H01H59/00;H01H61/04;H01L21/302;H01L23/373;H01L23/522;H01L27/12;H01L29/86;H02N1/00;H02N10/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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