Method for testing the leakage rate of vacuum capsulated devices,申请号EP20050810986-传众专利搜索

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发明名称	Method for testing the leakage rate of vacuum capsulated devices
摘要
申请公布号	EP1831664(A1)	申请公布日期	2007.09.12
申请号	EP20050810986	申请日期	2005.11.10
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	REINERT, WOLFGANG;KAEHLER, DIRK;MERZ, PETER
分类号	G01M3/18;G01M3/22;G01M3/32	主分类号	G01M3/18
代理机构		代理人
主权项
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