| 摘要 |
A silicon substrate for an ink jet head, a manufacturing method for the substrate, an ink jet head, and a manufacturing method for the ink jet head are provided to stably manufacture an ink jet recording head chip with higher precision. A method for manufacturing a silicon substrate for an ink jet head includes forming an etching mask layer on one side surface of a silicon substrate(1), the etching mask layer having an opening hole at a position corresponding to an ink supply port, forming at least two non-through holes at the longitudinal direction of the opening hole of the etching mask layer through the opening hole, and etching the silicon substrate at the opening to form the ink supply port in the silicon substrate.
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