WAFER TRANSFER APPARATUS HAVING DETECTING SENSOR

摘要

A wafer transfer apparatus having a detection sensor is provided to prevent errors of a light emitting part of a slip detection sensor by disposing the light emitting part of the slip detection sensor in a constant distance from an edge of a wafer. A moving body(120) is installed at a guide block(110) in order to perform horizontal motion and rotatory motion. One or more tweezers(130) are installed at one side of the moving body and include a loading part on which a wafer is loaded. A slip detection sensor includes a light receiving part to be inserted and loaded into the loading part and a light emitting part arranged at an upper side of the light receiving part. The light emitting part is separated from an edge of the wafer. The slip detection sensor senses a slipping state of the wafer by irradiating the light from the light emitting part to the light receiving part.