A PLASTIC BASED MICROFABRICATED THERMAL DEVICE AND A METHOD FOR MANUFACTURING THE SAME, AND A DNA AMPLIFICATION CHIP AND A METHOD FOR MANUFACTURING THE SAME USING THE SAME

摘要

A plastic-based microfabricated thermal device, a method for manufacturing the same device are provided to reduce the production costs of the device while temperature of substrate is uniformly controlled with low power compared to silicon or glass. A plastic-based microfabricated thermal device comprises: a plastic substrate(11); a heating tool which is formed on the upper side of plastic substrate, heats the plastic substrate and contains a heater(12A), an electrode(12C) and pads(12D, 12E) for supplying electric source to the heater through the electrode; a sensing tool(12B) which is formed on the upper side of plastic substrate and detects heat; and a diffusion tool(12F) which is formed in the rear side of the plastic substrate and diffuses heat to the plastic substrate, and further comprises an insulating membrane(13A) for covering the heating tool, sensing tool and diffusion tool in the upper and rear sides of substrate. The DNA amplification chip contains the plastic-based microfabricated thermal device, a silicon micro chamber which has a concave portion and is conjugated to the plastic-based microfabricated thermal device, and a cover for forming a reaction chamber by covering the concave portion.