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经营范围
发明名称
Clean room
摘要
申请公布号
EP0978691(B1)
申请公布日期
2007.09.12
申请号
EP19990114988
申请日期
1999.07.31
申请人
M+W ZANDER FACILITY ENGINEERING GMBH + CO. KG
发明人
RENZ, MANFRED, DR.
分类号
H01L21/00;F24F3/16
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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