发明名称 APPARATUS FOR TESTING INTEGRATED CIRCUITS CHIPS
摘要 An apparatus for inspecting an integrated circuits chip is provided to perform an aligning process without releasing or separating a probe card by aligning the probe card. A probe card(144) is used for inspecting electrical characteristics of an integrated circuit chip which is formed on a wafer. A housing(110) includes a loading part on which the prove card is loaded. The housing further includes an internal space for performing an inspection process. An adjusting member(150) is used for adjusting one of a horizontal level and height of the probe card. The adjusting member includes a plurality of screws(152) installed rotatably at an installation part. A hole is formed at an edge of the probe card so that the probe card moves up and down by the rotation of the screws.
申请公布号 KR20070091827(A) 申请公布日期 2007.09.12
申请号 KR20060021442 申请日期 2006.03.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NO, YOUNG KYO;JI, JOON SU
分类号 H01L21/66 主分类号 H01L21/66
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