发明名称 Apparatus and method for stacking laser bars for uniform facet coating
摘要 An apparatus for stacking photonic devices is disclosed. The apparatus can include a base, first and second spaced apart rail portions disposed on the base, and a vacuum guide disposed on the base between the rail portions for forming a vacuum gradient that pulls a plurality of photonic devices and spacer bars together into a stack. Optionally, spaced apart photonic device supports can be placed on the base between the rail portions to lift the photonic devices off of the surface of the base. The apparatus can also include a clamping system to hold the stack in place so that a vapor deposition process can be used to apply coatings to the photonic devices. In one exemplary embodiment, the photonic devices can be laser bars.
申请公布号 US7268005(B2) 申请公布日期 2007.09.11
申请号 US20030695641 申请日期 2003.10.27
申请人 FINISAR CORPORATION 发明人 CHEN JOHN;LEI CHUN;SHIH ROBERT
分类号 H01L21/00;H01S3/04;H01S3/08;H01S3/091;H01S3/094 主分类号 H01L21/00
代理机构 代理人
主权项
地址