Flexible rewiring plate for semiconductor components, and process for producing it

摘要

The present invention describes a rewiring plate for components with connection grids of between approx. 100 nm and 10 mum, which rewiring plate includes a base body and passages with carbon nanotubes, the lower end of the passages opening out into contact connection surfaces, and the carbon nanotubes forming an electrically conductive connection from the contact connection surfaces to the front surface of the base body.