| 摘要 |
A transducer assembly for the megasonic processing of an article and apparatus incorporating the same. The transducer assembly comprises a vibration transmitter having a portion configured to be positioned adjacent to and spaced from the surface of an article so that when fluid is applied to the surface of the article, a meniscus of the fluid forms between the surface of the article and the portion of the vibration transmitter. The transducer assembly also comprises a transducer coupled to the vibration transmitter, where the transducer can oscillate to propagate megasonic energy through the vibration transmitter and through the meniscus of the fluid. In one embodiment, the transducer is located within an enclosed space and at least one passageway is provided for flowing a gas in and/or out of the enclosed space. In an another embodiment, the portion of the vibration transmitter includes an elongated edge that is positioned close to and generally parallel to a surface of the article. In an apparatus incorporating the transducer assembly, a rotatable support is provided to support the article to be processed.
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