发明名称 COOLING/HEATING APPARATUS AND MOUNTING APPARATUS
摘要 A cooling/heating apparatus and a mounting apparatus are provided to suppress troubles and to reduce power consumption by removing electronic valves therefrom. A cooling/heating apparatus includes a heat medium circulation path for circulating a heat medium and a stirling heat engine for cooling or heating the heat medium in the heat medium circulation path. The cooled medium or the heated medium is circulated to a load in order to cool or heat the load. The stirling heat engine includes a first cylinder chamber(21A), a second cylinder chamber(22A) to be connected with the first cylinder chamber, a first and second pistons(23,24) for expanding or compressing operational gas within the first and the second cylinder chambers by performing reciprocating motion with a predetermined phase difference in the first and the second cylinder chambers, and a driving unit for driving the first and the second pistons. When the first and second pistons are driven in a forward direction, the operational gas is expanded within the first cylinder in order to reduce the temperature and to cool the heat medium. When the first and second pistons are driven in a backward direction, the operational gas is compressed in the first cylinder chamber in order to increase the temperature and to heat the heat medium.
申请公布号 KR20070091558(A) 申请公布日期 2007.09.11
申请号 KR20070021525 申请日期 2007.03.05
申请人 TOKYO ELECTRON LIMITED 发明人 HATTA MASATAKA
分类号 H01L21/02;H01L23/34 主分类号 H01L21/02
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