Sputtering apparatus and method for regenerating thereof,申请号KR20070021705-传众专利搜索

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发明名称	Sputtering apparatus and method for regenerating thereof
摘要
申请公布号	KR100757805(B1)	申请公布日期	2007.09.11
申请号	KR20070021705	申请日期	2007.03.06
申请人		发明人
分类号	C23C14/34;H01L21/203	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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