发明名称 |
Method of fabricating optical filters |
摘要 |
A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.
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申请公布号 |
US7267781(B2) |
申请公布日期 |
2007.09.11 |
申请号 |
US20040871689 |
申请日期 |
2004.06.02 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
STEINBERG DAN A.;DAUTARTAS MINDAUGAS F.;SHERRER DAVID W. |
分类号 |
B29D11/00;G02B5/28;H01L21/00 |
主分类号 |
B29D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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