发明名称 Method of fabricating optical filters
摘要 A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.
申请公布号 US7267781(B2) 申请公布日期 2007.09.11
申请号 US20040871689 申请日期 2004.06.02
申请人 SHIPLEY COMPANY, L.L.C. 发明人 STEINBERG DAN A.;DAUTARTAS MINDAUGAS F.;SHERRER DAVID W.
分类号 B29D11/00;G02B5/28;H01L21/00 主分类号 B29D11/00
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