MULTICHANNEL SPECTROSCOPIC ELLIPSOMETER WITH FLUX-CONTROLLED PIXELS

摘要

A multi-channel spectroscopic ellipsometer for controlling pixel radiation intensity is provided to detect data having high signal-to-noise ratio at the whole wavelength by controlling the inputting radiation intensity of a channel. A multi-channel spectroscopic ellipsometer for controlling pixel radiation intensity includes a white light source(11), a polarizing generating unit(12), a polarizing spectrometer(16), a spectroscope(17A), and a multi-channel detectors(200). The polarizing generating unit polarizes light outputted from the white light source to input the light to a sample(13). The polarizing spectrometer receives polarization where a polarization state is changed by being reflected from the sample to make the polarization passing through a predetermined direction. The light passing the polarizing spectrometer is classified by a wavelength on the spectroscope. The multi-channel detector controls the inputting radiation intensity of a channel having the excessive inputting radiation intensity of the light inputted to the spectroscope to detect the brightness of the light.