Apparatus and method for inspecting a semiconductor component

摘要

Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder ( 16 ) so that an illumination device ( 38, 40, 42 ) is integrated into the substrate holder ( 16 ) in such a way that transmitted-light illumination of the wafer ( 18 ) is possible.