发明名称 Semiconductor substrate having first and second pairs of word lines
摘要 The invention includes methods of forming memory circuitry. In one implementation, a semiconductor substrate includes a pair of word lines having a bit node received therebetween. A bit node contact opening is formed within insulative material over the bit node. Sacrificial plugging material is formed within the bit node contact opening between the pair of word lines. Sacrificial plugging material is removed from the bit node contact opening between the pair of word lines, and it is replaced with conductive material that is in electrical connection with the bit node. Thereafter, the conductive material is formed into a bit line.
申请公布号 US7268384(B2) 申请公布日期 2007.09.11
申请号 US20050292028 申请日期 2005.12.01
申请人 MICRON TECHNOLOGY, INC. 发明人 PAREKH KUNAL R.;BURGESS BYRON N.
分类号 G11C11/00;H01L21/60;H01L21/8234;H01L21/8242;H01L27/108 主分类号 G11C11/00
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