发明名称 Optoelectronic harmonically filtered detector system for a scanning unit
摘要 An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection plane with fringe-pattern period P in a fringe-displacement direction. The detector system is made up of a plurality of detector elements, the geometrical shape of the detector elements being selected such that a defined filtering of unwanted harmonics from the scanning signals thereby results. Within one fringe-pattern period P, a total of N detector elements of the same geometrical shape are arranged one immediately after the other in measuring direction x.
申请公布号 US7268883(B2) 申请公布日期 2007.09.11
申请号 US20040838619 申请日期 2004.05.03
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 HOLZAPFEL WOLFGANG
分类号 G01B9/02;G01D5/347;G01D5/36;G01D5/38 主分类号 G01B9/02
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