发明名称 Illuminating device
摘要 An illuminating device, as for a microscope, includes a light source and a reflecting filter system. The beam of light of the light source undergoes a plurality of reflections in the reflecting filter system. The entering beam of the reflecting filter system has an optical beam offset and/or a change in direction relative to the exiting beam.
申请公布号 US7268940(B2) 申请公布日期 2007.09.11
申请号 US20030475559 申请日期 2003.10.21
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 VEITH MICHAEL;DANNER LAMBERT
分类号 G02B21/06;G02B21/16;H01L21/66 主分类号 G02B21/06
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