| 摘要 |
A manufacturing method of an organic electro-luminescence display device having organic luminescence layers with different thicknesses by R,G,B pixels and a manufacturing method thereof are provided to reduce the number of masks and a photolithography process by forming an anode with only two masks. A manufacturing method of an organic electro-luminescence display device includes the steps of: forming a metal film(115) on a substrate(110) having separated R, G, B pixel regions; forming a buffer layer on the metal film(115); forming buffer patterns(120a,120b,120c) with different thicknesses by performing photolithography and etching processes on the buffer layer with a halftone mask(200); forming a metal pattern by etching the metal film(115) in the shape of the buffer patterns(120a,120b,120c); forming a transparent conductive layer on the substrate(110) having the buffer patterns(120a,120b,120c) and the metal pattern; forming an anode by etching the transparent conductive layer by R, G, B pixels; forming an insulating layer having an opening for exposing an upper part of the anode; selectively forming R, G, B organic luminescence layers in the opening; and forming a cathode on the organic luminescence layer and the insulating layer. |
